Teledyne MEMS

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screenshot of Teledyne MEMS's Official Website
Source: Teledyne MEMS's Official Website (https://www.teledynemems.com/)

Teledyne MEMS supplies the semiconductor field with microfabrication services for silicon, glass, and other materials.

This page presents the strengths of Teledyne MEMS's microfabrication services, the materials they can work with, and more.

Teledyne MEMS's microfabrication services

Teledyne MEMS's core services are 5x lithography services using ASML photolithography equipment.
Its strengths include its pattern resolution capabilities, capable of creating features measuring just 0.35 µm (0.00035 mm), and its positioning accuracy of ±0.1 µm (±0.0001 mm).

These processes are used for a wide range of applications, such as medical MEMS (pressure sensors, flow sensors, etc.), optical MEMS (micromirrors, optical shutters, etc.), inertia sensors, biochips, and microchannel devices.

Fabrication services

Teledyne MEMS's fabrication services are primarily centered on photolithography, printing the circuit patterns used in semiconductors.

It also offers etching to remove unnecessary portions, processing methods for depositing films on substrates based on item usage purposes, and the drilling of microholes for wiring, all in-house.

Supported materials

Teledyne MEMS works with diverse wafer materials, such as silicon, polymer, and glass.
It supports the manufacturing of devices for a wide range of fields, including the optical, medical, bio MEMS, and pressure sensor fields.

Supported sizes

Teledyne MEMS manufactures MEMS with its 150 mm and 200 mm wafer lines.
The lines have a high degree of commonality, so processes set up on the 150 mm line can be transferred to the 200 mm line.

The 200 mm line also supports wafer-level bonding, integrating MEMS structures and CMOS circuits.

CHECK Finding Your Partner Based on Processing Style

Teledyne MEMS excels at all kinds of surface processing used in the manufacturing of MEMS.
It therefore makes a great partner for companies developing MEMS sensors, optical devices, and semiconductor processes, which require micron-level pattern formation and multilayer film structures.

In addition to Teledyne MEMS, this site introduces various other microfabrication service providers, categorized by fabrication method.
It's an invaluable resource for companies trying to decide on a fabrication partner.

Examples of Teledyne MEMS's microfabrication

Not listed on the official website

Company Information

Company Name Teledyne Technologies Incorporated
Location 1049 Camino Dos Rios
Thousand Oaks, CA 91360
USA
Telephone +1-(805)-373-4545
Website https://www.teledyne.com/
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Top Three Recommended
Microfabrication Partners
For
difficult-to-cut
materials
Koyo High Precision
Koyo High Precision website
Source: Koyo High Precision website (https://koyohighprecision.com/)
Examples of supported materials

Tungsten, molybdenum, tantalum,etc.

Main fabrication technologies
  • Micro drilling
  • Lathe machining
  • Milling
Why We Recommend
  • They perform fabrication for a wide range of sizes, from ⌀3 to 220 mm,and they can handle everything from prototype development to mass production fabrication for difficult-to-cut materials
  • They can achieve a fabrication precision of ±3 μm even for tungsten,which is known for being difficult to cut.
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microcomponent
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Atomica
Atomica website
Source: Atomica website (https://atomica.com/)
Examples of supported materials

Silicon, glass, quartz,etc.

Main fabrication technologies
  • Dry etching
  • Wet etching
  • Photolithography
  • Wafer testing
Why We Recommend
  • Uses deep reactive ion etching (DRIE) technology to perform microfabrication, even for microcomponents.
  • Specializes in technologies such as MEMS and photonics and provides mass production-oriented services.
For
Surface
Processing
Teledyne MEMS
Teledyne website
Source: Teledyne website (https://www.teledynemems.com/)
Examples of supported materials

Silicon, glass, copper,Etc.

Main fabrication technologies
  • Photolithography
  • Thin film deposition
  • Sputtering
Why we Recommend
  • A comprehensive MEMS foundry that provides integrated support for everything from photolithography to film deposition and sputtering.
  • In addition to silicon, it can also work with glass, multi-layer film, and transparent wafers.